M330H and M330AH Heatable Mass Flow Controller (MFC)
|
Pin
|
Description
|
| 1 |
Valve Open/Close Input(1) |
| 2 |
Flow Rate Output Signal (0 to +5VDC) |
| 3 |
Power Supply +15VDC Input(2) |
| 4 |
Power Common |
| 5 |
Power Supply -15VDC Input(2) |
| 6 |
Flow Rate Set Point Input (0 to +5VDC) |
| 7 |
Signal Common |
| 8 |
Signal Common |
| 9 |
Optional Signal Input(3) |
|
(1) Valve open: connect pin 1 to +15VDC
Valve close: connect pin 1 to -15VDC.
(2) Connect to proper power source. Requires at least 120mA/MFC channel
with acceptable noise performance under EMC Directive 89/336/EEC.
(3) Pressure signal input for closed loop pressure control.
|
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This information is subject to change without notice.
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