SEMI E78 Audit
What is E78?
SEMI E78 is the first guidelines for static control for semiconductor process tools. The guideline recommends safe levels of static charge based on the sensitivity of the product. The guideline includes standardized test methods to measure the levels of compliance.
What does E78-Compliance Do For You?
OEMs that adopt SEMI E78 compliance have a distinct advantage when working with end users. End users concerned with damage caused by ESD and EMI choose vendors who offer E78 compliant equipment. By resolving electrostatic issues internal to the equipment, tool manufacturers verify that ESD and EMI problems have been eliminated before the tool enters the factory. E78 compliance improves tool uptime, increases the mean time between failures (MTBF) and mean time between assists (MTBA), and decreases field service costs to the tool related to ESD and EMI issues.
What can Ion do?
Ion offers comprehensive solutions-based SEMI E78 compliance testing. Ion has performed extensive tests on its SEMI E78-certified evaluation equipment to verify the accuracy and precision of the instrumentation used. Our engineers follow exclusive procedures that assure constant and consistent quality results, making them unmatched in their ability to analyze a system and identify sources of ESD and EMI. Ion presents engineered solutions that address all aspects of a complete electrostatics management program, including grounding, material and, when necessary, ionization that works within the airflow dynamic in the tool.
It's simple
E78 compliant tools lead to a reduction of electrostatic charge and the problems it causes. The result is more efficient, more productive and more profitable semiconductor manufacturing.
More E78 Information:
The Role of Ionization in E78 Compliant Tools
Understanding and Applying SEMI's E78 Guide
Need help?
Contact an Application Specialist, Sales Services, or Technical Support by sending an email to MKS, Ion Systems or call 800-367-2452 or 510-217-0600.
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